TOWARDS IN-SITU TEM ANALYSIS OF PLD Pb(Zr,Ti)O3 THIN FILM MEMBRANES
نویسندگان
چکیده
In this paper, a novel technique for fabricating Transmission Electron Microscopy (TEM) chips for investigating structural and piezoelectric properties of Pulse Laser Deposited (PLD) Lead Zirconium Titanate (PZT) thin films is presented. The method involves silicon-on-insulator (SOI) wafer technology together with deep reactive ion etching (DRIE) and highly selective etchants. This study is unique in the sense that it will facilitate in-situ characterization of the PLD PZT membranes during actuation. As well as PLD PZT, the proposed method can be applied to a variety of materials by proper selection of the etchants and tuning of the process parameters. Being a critical step of the process sequence, the deposition profile of the PZT layer on the Lanthanum Nickel Oxide (LNO) seed layer is characterized prior to fabrication. The results reveal that the PLD process is not conformal and the thickness of the LNO/PZT layer is different on surfaces with differ-
منابع مشابه
CHARACTERIZATION OF PIEZOELECTRICALLY ACTUATED PLD Pb(Zr,Ti)O3 THIN FILM MEMBRANES
In our previous work, we presented a novel technique for fabricating Transmission Electron Microscopy (TEM) chips in order to investigate structural and piezoelectric properties of Pulsed Laser Deposited (PLD) Lead Zirconium Titanate (Pb(Zr,Ti)O3) (PZT) thin films [1]. We accomplished the fabrication of the devices we presented last year and obtained fully functional PLD PZT membranes. In this ...
متن کاملPb(Zr,Ti)O3 Thin Films on Zirconium Membranes for Micromechanical Applications
An efficient, electrically conductive, chemical barrier for the integration of piezoelectric Pb(Zr,Ti)O3 (PZT) films on reactive metal substrates has been developed, opening new possibilities for PZT integration on micromechanical and semiconductor devices, Very reactive zirconium films have been taken in order to test the quality of the specially designed RuO2/Cr buffer under the condition of ...
متن کاملHigh coupling piezoelectric thin films of Pb„Zr,Ti...O3-based ternary perovskite compounds for GHz-range film bulk acoustic resonators
We have deposited nearly stress-free single-crystal thin films of 001 Pb Mn,Nb O3–Pb Zr,Ti O3 PMnN-PZT on 001 MgO substrates by rf-magnetron sputtering using a quenching process after the film growth. It is found that single c-domain/single-crystal thin films of PMnN-PZT containing 5%–10% PMnN show a strong hard ferroelectric response with 2Ec 400 kV /cm and Ps 70 C /cm2. GHz-range film bulk ac...
متن کاملAerosol Deposition on Transparent Electro-Optic Films for Optical Modulators
Complex thin oxide films with electro-optic (EO) properties are promising for use in advanced optical devices because of their large EO effect. We developed a method of aerosol deposition (AD) for fabricating EO films. The mechanism for AD is based on the solidification by impact of submicron particles onto a substrate. Since particles in AD films preserve their crystalline structure during the...
متن کامل